Process Mining Machine Recoveries to Reduce Downtime

33:28Recorded on 20 June 2019 at TU Eindhoven

Freerk Jilderda(ASML, Netherlands)

ASML is the leading developer of photolithography systems for the semiconductor industry. Freerk shows how he has used process mining to analyze and improve lithography system start and calibration sequences, resulting in higher system availability.

Synopsis

ASML provides chip makers with everything they need to mass-produce patterns on silicon, helping to increase the value and lower the cost of a chip. The key technology is the lithography system, which brings together high-tech hardware and advanced software to control the chip manufacturing process down to the nanometer. All of the world’s top chipmakers like Samsung, Intel and TSMC use ASML’s technology, enabling the waves of innovation that help tackle the world’s toughest challenges.

The machines are developed and assembled in Veldhoven in the Netherlands and shipped to customers all over the world. Freerk Jilderda is a project manager running structural improvement projects in the Development & Engineering sector. Availability of the machines is crucial and, therefore, Freerk started a project to reduce the recovery time.

A recovery is a procedure of tests and calibrations to get the machine back up and running after repairs or maintenance. The ideal recovery is described by a procedure containing a sequence of 140 steps. After Freerk’s team identified the recoveries from the machine logging, they used process mining to compare the recoveries with the procedure to identify the key deviations. In this way they were able to find steps that are not part of the expected recovery procedure and improve the process.

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